JPH0242426U - - Google Patents
Info
- Publication number
- JPH0242426U JPH0242426U JP12165588U JP12165588U JPH0242426U JP H0242426 U JPH0242426 U JP H0242426U JP 12165588 U JP12165588 U JP 12165588U JP 12165588 U JP12165588 U JP 12165588U JP H0242426 U JPH0242426 U JP H0242426U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- wafer
- swinging surface
- aligner
- sor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005469 synchrotron radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12165588U JPH0242426U (en]) | 1988-09-19 | 1988-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12165588U JPH0242426U (en]) | 1988-09-19 | 1988-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242426U true JPH0242426U (en]) | 1990-03-23 |
Family
ID=31368861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12165588U Pending JPH0242426U (en]) | 1988-09-19 | 1988-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242426U (en]) |
-
1988
- 1988-09-19 JP JP12165588U patent/JPH0242426U/ja active Pending